KS-FT200/300 series high-throughput coater/developer are independently developed by Kingsemi for 28nm and above technology nodes, covering I-line, ArF, KrF, PI, BARC, SOC, SOD, and other materials coating/developing processes. KS-FT200/300 supports both stand-alone and inline operation with many mainstream photolithography tools (scanner). KS-FT200/300 is the first photolithography track entirely developed and manufactured in China. It complies with various industry standards and has been fully certified. Its small footprint, high reliability and serviceability make it suitable for many IC manufacturing processes.