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KS-S150-4ST 150mm Single-wafer wet stripper

KS-S150-4ST is suitable for photoresist removal, metal stripping and other processes in the field of LED/Compound semiconductor manufacturing
产品优势:

1. Simultaneous support for 4-inch and 6-inch wafers
2. Dual swing arms for chemicals and programmable scanning speed for process control
3. Wafer dry-in and dry-out
4. Chemical recycling and reuse, metal recovery and completely separate drain for different chemicals

应用领域:

● LED chip manufacturing
● PSS manufacturing
● Compound semiconductor manufacturing