Supply Chain
contact us
TOP

KS-S150-6ST Single-wafer wet stripper

Used for photoresist removal process in high-end packaging field, mask cleaning, photoresist removal and metal stripping after evaporation in OLED field, and photoresist removal and metal stripping after evaporation in compound semiconductor field
产品优势:

1. Independent IP dual vacuum dual clamp four hand high-speed manipulator, high productivity, dry and wet separation, no cross pollution
2. It has AWC high-efficiency image centering function
3. Adopt immersion system compatible with different sizes and angles
4. Closed loop control of high-pressure pipeline system can achieve pressure control accuracy of target value ± 0.2MPa
5. The independent IP high-pressure online heater can achieve the same temperature control as the international heater
6. The process unit adopts active chuck clamping, which can avoid crystal back scratches and wafer rollover
7. The degumming solution can be automatically recovered and recycled

应用领域:

● Packaging
● OLED