1. Independent IP dual vacuum dual clamp four hand high-speed manipulator, high productivity, dry and wet separation, no cross pollution
2. It has AWC high-efficiency image centering function
3. Adopt immersion system compatible with different sizes and angles
4. Closed loop control of high-pressure pipeline system can achieve pressure control accuracy of target value ± 0.2MPa
5. The independent IP high-pressure online heater can achieve the same temperature control as the international heater
6. The process unit adopts active chuck clamping, which can avoid crystal back scratches and wafer rollover
7. The degumming solution can be automatically recovered and recycled