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KS-S200-2H1L Fully-automatic SiC Scribe & Break Machine

Frame size:8 Inch

Wafer size:200mm(Compatible with 150mm)

Max throughput:20WPH

SiC dicing speed:100mm/s

Dimensions: W2730×D2260×H2230 (mm)

Advantages:

Compact design, Small footprint

Standardized unit size, Flexible configuration

High productivity, Fast dicing speed

Dry process, No liquid utility requirements

Smooth cross-section, Few burrs and minimal cracks

No Kerf-loss, More DPW

Application Area:

Applicable to SiC wafer dicing and die splitting processes