HomeAbout KingsemiNews CenterProduct CenterSupply ChainHRContact Us
About
Kingsemi IntroductionPatented TechnologyHonorSystem CertificationShanghai Kingsemi
News
  • Company News
  • Industry News
    • Product
    Developer Coater Scrubber Stripper Etcher
    Supply Chain
    Supply Chain
    HR
    Company CultureRecruitmentCampus RecruitingCore WordsTrainingStaff style
    contact us
    contact us
    TOP
    Developer Coater Scrubber Stripper Etcher

    KS-S300-SR Single-wafer scrubber for advanced packaging

    KS-S300-SR is designed for wafer-level-packaging and OLED cleaning processes, implementing high and medium pressure jetting, megasonic, two-fluid spray, brush, and other cleaning methods. It can effectively remove particles, organic contamination, metal ions and other impurities on wafer surface, as well as clean of fluoropolymer inside deep TSV holes.
    产品优势：

    1. Highly-stable liquid pressure to ensure process performance and throughput.
    2. Optimized megasonic energy to effectively remove contaminants in deep holes and trenches without damaging the pattern.
    3. Tight control of critical process parameters to ensure high consistency.

    应用领域：

    Removal of particle contamination on wafer surface and removal of fluoropolymer in deep TSV holes for advanced packaging.
    Substrate incoming clean, pre-deposition clean, boron and phosphorus clean, and pre-evaporation clean for OLED manufacturing.

    联系我们
    上一页：KS-CF300/200-8SR Single-wafer scrubber for IC manufacturing 下一页：KS-M300 Semi-automatic machine
    返回
    Copyright©2022 KINGSEMI Co., Ltd.|辽ICP备11003098号-1技术支持：优诺科技
    Alternate Text