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KS-S150 150mm automatic coater & developer

KS-S150 automatic coater & developer targets the coating & developing processes of LED-PSS and advanced packaging applications. It is compatible with a wide range of substrates, including sapphire, gallium arsenide, silicon carbide and other materials. The product has passed CSA certification.

1. Small footprint, high reliability, and high serviceability
2. High throughput (>155WPH)
3. Low photoresist consumption per wafer
4. Excellent coating thickness uniformity ensured by optimized flow field design


●  传感器芯片制造
●  Sensors
●  communication
●  components
●  power components
●  LED chips
●  PSS