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KS-S300 300mm
coater & developer

KS-S300 coater & developer is used in advanced packaging, MEMS, OLED and many other applications, with throughput of >100WPH. It is compatible with different wafer materials, such as silicon, glass, bonded wafer, compound wafer, etc. The product has won the second place prize of “Excellent New Products” of Liaoning Province, and the second place prize of “Science and Technology Award” of Liaoning Province. The product is semi S2 certified.
Product features:

1. Capability of ultra-thin wafer processing and ultra-thick photoresist application (coating, development and baking)

2. Optimized design of coater module to avoid common defects of high viscosity photoresist applications

3. Fully-enclosed modules that can be configured flexibly

4. Small footprint and high throughput

5. Capability of handling wafer with large warpage (>5mm)

6. Progressive baking capability 

Applications:

●Packaging

MEMS

OLED