Supply Chain
Contact Us
投资者关系
TOP

KS-C300
300mm
Clustered coater & developer

KS-C300 300mm clustered coater & developer can be used for the coating & developing processes of advanced packaging, MEMS, OLED and other applications, with throughput of >120 WPH and reduced CoO (Cost of Ownership). It is compatible with different wafer materials, such as silicon, glass, bonded wafers, compound wafers, etc. The product can be used in logic, memory, CIS, power device, OLED and other applications. The product is semi S2 certified.
Product features:
  • 1. Capability of ultra-thin wafer processing and ultra-thick photoresist application (coating, development and baking)

    2. Optimized design of coater module to avoid common defects of high viscosity photoresist applications

    3. Fully-enclosed modules that can be configured flexibly

    4. Small footprint and high throughput

    5. Capability of handling wafer with large warpage (>5mm)

    6. Progressive baking capability


Applications:

 packaging

 MEMS and OLED