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KS-S150 150mm
automatic coater & developer

KS-S150 automatic coater & developer targets the coating & developing processes of LED-PSS and advanced packaging applications. It is compatible with a wide range of substrates, including sapphire, gallium arsenide, silicon carbide and other materials. The product has passed CSA certification.
Product features:
  • 1. Small footprint, high reliability, and high serviceability

    2. High throughput (>155WPH)

    3. Low photoresist consumption per wafer

    4. Excellent coating thickness uniformity ensured by optimized flow field design

Applications:

● Sensors
● communication 

● components

● power components,

● LED chips

● PSS