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KS-M300
Semi-automatic equipment

KS-M300 Semi-automatic equipment is designed for single wafer coating, developing, spraying, cleaning, etching, degumming processes, and can also be used to photomask coating, developing and cleaning processes. It is suitable for process verification and small batch production. The substrates are loaded and unloaded manually. However, the process recipe is run automatically.
Product features:

  • 1. Small footprint and flexible configuration

    2. Ease to operate and service, and user-friendly interface


Applications:

packaging
MEMS
OLED and etc.